6-Axis Stress Tensor Sensor Using Multifaceted Silicon Piezoresistors
نویسندگان
چکیده
منابع مشابه
A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology.
This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based se...
متن کاملThe multifaceted therapeutic potential of valproic acid beyond CNS axis
Valproic acid is widely used as an anti-epileptic globally. Anti-epileptic action is mediated by Gamma Amino Butyric Acid (GABA) receptors. In past and recently, several other clinical outcomes have been proposed by various studies. These under-reported clinical actions apart from anti-epileptic activity are mediated by various intracellular and extracellular pathways. Several mechanisms like H...
متن کاملHigh Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget
This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films. By in-situ phosphorus doping of precursor amorphous silicon films e-beam evaporated at room temperature on aluminium layer, we are able to increase and control the gauge factor of the polysilicon films f...
متن کاملCharacteristic and analysis of silicon germanium material as MEMS pressure sensor
The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sen...
متن کاملAxis-by-Axis Stress Minimization
Graph drawing algorithms based on minimizing the so-called stress energy strive to place nodes in accordance with target distances. They were first introduced to the graph drawing field by Kamada and Kawai [11], and they had previously been used to visualize general kinds of data by multidimensional scaling. In this paper we suggest a novel algorithm for the minimization of the Stress energy. U...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12030279